Spectroscopic Ellipsometry
Principles and Applications
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
Specificaties
| ISBN/EAN | 9780470016084 |
| Auteur | Hiroyuki (National Institute of Advanced Industrial Science & Technology Fujiwara |
| Uitgever | Van Ditmar Boekenimport B.V. |
| Taal | Engels |
| Uitvoering | Gebonden in harde band |
| Pagina's | 392 |
| Lengte | 235.0 mm |
| Breedte | 159.0 mm |